Application Overview
In semiconductor manufacturing, the purity and safe handling of chemicals are critical to wafer yield and product reliability. Chemicals used for wafer cleaning, etching, stripping, and surface treatment are often highly corrosive, require ultra-high purity, and are extremely sensitive to leakage or contamination.
Magnetic pumps feature a sealless, leak-free design with magnetic coupling, effectively preventing chemical leakage and external contamination. They are essential for ensuring process safety and chemical purity in semiconductor applications. These pumps are widely used for high-purity chemical transfer, process circulation, and filtration system integration, meeting the stringent stability and cleanliness requirements of the semiconductor industry.
Typical Applications
High-Purity Chemical Transfer
Safely transfers methanol, peroxides, acetone, xylene, and various high-purity acids and alkalis.
Wafer Cleaning Chemical Supply
Provides stable and contamination-free chemical delivery for wafer cleaning processes.
Etching and Stripping Process Transfer
Handles continuous transfer of critical chemicals used in etching and stripping processes.
Filtration and Purification System Supply
Supplies stable flow to high-precision filtration and purification systems.
Leakage and Contamination Risk Reduction
Sealless design significantly reduces the risk of leakage and particle contamination.