Application Overview
In semiconductor manufacturing, the accuracy of chemical dosing directly affects process stability, wafer yield, and equipment safety. Processes such as wafer cleaning, etching, CMP, wastewater treatment, and ultra-pure water systems all require precise and controlled dosing of acids, alkalis, oxidizers, and functional chemicals.
Metering dosing pumps provide high-precision, repeatable chemical injection with support for continuous or intermittent operation. They can be integrated with automated control systems to maintain stable process parameters, making them essential equipment for automated and precise chemical management in semiconductor fabs.
Typical Applications
Safe Transfer of Plating Chemicals
Transfers highly corrosive plating solutions while preventing leakage and equipment corrosion.
Chemical Circulation Supply
Provides stable chemical circulation for multiple process tanks in plating lines.
Filtration System Supply
Supplies clean and stable flow to bag or cartridge filtration systems.
Reduced Maintenance and Downtime
Eliminates mechanical seals, reducing maintenance requirements and unplanned downtime.